SwissLitho NanoFrazor Explore

The NanoFrazor is a unique tool for rapid prototyping of 3D nano-structures and nano-devices. The patterning principle of the NanoFrazor technology is based on Thermal Scanning Probe Lithography (t-SPL) which originates from IBM Rueschlikon.

The NanoFrazor uses a hot probe tip to locally heat an organic resist which instantly decomposes into volatile units. The volatile units evaporate and leave arbitrary shaped nanometer sized cavities. The NanoFrazor has been developed for researchers who want to have easy and quick access to high-resolution nanometer sized geometries. Even 3D nano-patterns can be fabricated in a single step with unmatched precision. The closed-loop lithography (CLL) concept of the technology makes the patterning procedure extremely robust at 1 nm vertical resolution. Simultaneous inspection of the written nanostructures allows immediate quality control and feedback. Furthermore the in-situ inspection capability of the NanoFrazor facilitates novel and unique ways for stitching and overlay at sub 5 nm precision.

 

NanoFrazor Features

  • Unique thermal cantilevers invented at IBM Research
  • Modes: Write, Read or Write+Read (CLL-mode) at ambient or gas environment
  • Correlation Stitching
  • Correlation Overlay
  • Maximum area accessible with the ultra-sharp tips: 100 mm x 100 mm
  • Integrated high-resolution optical microscope
  • Straightforward cantilever exchange
  • Easy-to-use graphical user interface
  • Open software environment for own software extensions (based on C++ and Igor Pro)
  • Standalone housing fits into any laboratory or cleanroom, easy transportation
  • Triple-layer anti-acoustic housing
  • Vibration isolated granite table with threads; space to integrate additional equipment
  • Integrated 19-inch rack with room for additional electronic controllers
  • Integrated gas supply which makes the NanoFrazor independent of the lab environment
  • Humidity and temperature monitoring
  • Realistically priced for University and industrial R&D budgets